IV B.Tech I Semester Supplementary Examinations, February/March – 2018
MICRO ELECTRO MECHANICAL SYSTEMS (Open Elective)Time: 3 hours Max. Marks: 70
Question paper consists of Part-A and Part-B
Answer ALL sub questions from Part-A
Answer any THREE questions from Part-B
*****
PART ?A (22 Marks)1. a) Discuss the scope of the subject MEMS. [3]
b) Explain the basic characteristics of thermal sensors. [4]
c) What are the important applications of MOEMS devices? [4]
d) Explain the principle of working of magneto resistive sensor. [4]
e) Draw the block diagram of a general communication system. [3]
f) Write short note on fluorescence detection. [4]
PART ?B (3×16 = 48 Marks)2. a) Discuss about the factors influencing the process of transferring the image
through lithography.
[7]
b) With the help f line diagram explain the functioning of MEMS microphone. [9]
3. a) Discuss in detail about the functioning of shape memory alloys. [7]
b) Describe and explain the working of microplate type gas sensor. [9]
4. a) Explain the principle of operation of various types of optical switches used in
optical communication systems.
[9]
b) Discuss the use of MOEMS devices for shear stress measurement. [7]
5. a) Discuss the principle of working and applications of magnetic probe based
storage device.
[9]
b) Explain how a MOKE device works. [7]
6. a) What are the advantages of using RF MEMS as compared to traditional units and
systems?
[7]
b) With the help of suitable diagram explain the features of electro wetting based
fluid flow.
[9]
7. a) Explain various types of primary sensing principles used in biochemical sensors. [8]
b) With suitable diagram explain the working of chemoresistor. [8]
Code No: RT41035
Set No. 1
R13
1 of 1
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